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ELECTRONIC MATERIALS

Electron Beam Resist

A wide selection for a variety of needs, including photomasks, EB direct drawing, thin film magnetic heads, and compound semiconductors, as well as research and development.

Product Properties Applications View Report
ZEP520A
ZEP520A-7
Positive EB resists, chain scission type, for wet and dry etch. R&D, GMR head, etc. ZEP520A.pdf
ZEP7000 Positive EB resists, chain scission type, for wet and dry etch. Photo mask, X-ray mask, R&D, etc. ZEP7000.pdf


Thinner for Electron Beam Resist

Solvent to adjust the viscosity of ZEON’s electron beam resist.

Product Properties Applications View Report
ZEP-A Thinner for ZEP520A and ZEP7000A resists Thinner, Cleaner ZEP520A.pdf
ZEP-D Thinner for ZEP7000 resist Thinner, Cleaner ZEP7000.pdf


Developer and Rinse for Electron Beam Resist

Developers and rinse for ZEON’s electron beam resist.

Product Properties Applications View Report
ZED-N50 Developer for ZEP520 series resists Developer for ZEP520A ZEP520A.pdf
ZED-500 Developer for ZEP7000 series resists Developer for ZEP7000 ZEP7000.pdf
ZED-750 Developer for ZEP7000 series resists Developer for ZEP7000 ZEP7000.pdf


Separator and Insulator for EL Display

Organic EL display material.

Product Properties Applications View Report
ZPN2464-27 Under cut pattern profile, Good thermal stability,
Low degas level
Cathode Electrode for EL device ZPN2464.pdf
ZWD6216-6 Alkaline development, Good organic solvent resistance, Low degas level Insulator for EL device ZWD6216.pdf


Cleaner

Back rinse and edge-bead remover and can be used for cleaning resist coating equipment.

Product Properties Applications View Report
ZDMAC Remover for Photoresists and Stripping of ZEP7000 Semiconductors ZEP520A.pdf
ZEP7000.pdf
 

 

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